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Spectral confocal displacement sensor: a new non-contact measurement technique with nanoscale accuracy

二月 18 2025 2025-02 Sensors CW Industries
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With the rapid development of science and technology, measurement technology is playing an increasingly important role in many fields. For semiconductor, photoelectric equipment, medicine, precision manufacturing and other industries, the traditional contact measurement method has been unable to meet the requirements of high precision and high efficiency.

     With the rapid development of science and technology, measurement technology is playing an increasingly important role in many fields. For semiconductor, photoelectric equipment, medicine, precision manufacturing and other industries, the traditional contact measurement method has been unable to meet the requirements of high precision and high efficiency. At this time, the spectral confocal displacement sensor came into being, as a new non-contact measurement technology, with the advantages of reaching nanoscale accuracy and particularly fast response speed, slowly becoming a particularly important tool in the field of high-end manufacturing and scientific research.

     Let's start with how it works. The work of spectral confocal displacement sensor depends on the methods of optical interference and spectral analysis. It is mainly composed of light source, BZX85C4V7 TAP optical modulator, confocal optical system, detector and data processing unit.

     First, the light source emits a laser beam of a specific wavelength, which passes through the light modulator and forms a specific waveform. These laser beams are then focused through a confocal optical system, and when the laser beam hits the surface of the object under test, it is reflected back. At this point, the sensor receives the reflected light and then performs an interferometric measurement.

     Confocal displacement sensor is different from traditional displacement sensor. It uses the wave characteristics of light to analyze the spectral information of reflected light to find out the displacement and shape of the object surface. This non-contact measurement method can not only avoid interference caused by contact, but also make very accurate measurements in a variety of complex environments.

     Let's talk about nanoscale accuracy. The spectral confocal displacement sensor has a very powerful feature, that is, the measurement accuracy can reach the nanometer level. Its accuracy is affected by many factors, such as the stability of the light source, the good design of the optical system, and the effectiveness of the data processing algorithm. But as long as these factors are optimized, the sensor will be very accurate, generally down to a few nanometers.

     In practical applications, such as in semiconductor manufacturing, confocal displacement sensors can accurately measure the thickness and surface profile of wafers, which can ensure good product quality and high production efficiency. The technology is also used in microelectronics, optics and biomedical research, allowing researchers to obtain finer and more accurate data.

     Let's talk about the advantages of non-contact measurement. Compared with the traditional contact measurement method, the non-contact advantage of the spectral confocal displacement sensor is too obvious. Traditional measurement technology often requires direct contact between the measuring instrument and the object to be measured, so that the object may be deformed, worn or contaminated. The spectral confocal displacement sensor does not touch the object during measurement, and will not cause any physical damage to the measured object, which can ensure that the measured object is intact,and the measurement data is accurate.

     In addition, due to its special working principle, it can also be used in high-speed dynamic situations. In many industrial applications, the motion speed of the workpiece is fast and irregular, and traditional sensors cannot keep up, while the spectral confocal displacement sensor can obtain data in a very short time, providing a good solution for real-time monitoring and quality control.

     Spectral confocal displacement sensors have a wide range of applications, which can cover almost every aspect of modern industrial manufacturing. In the semiconductor industry, it can be used for wafer surface measurement and pattern profile detection. In the field of optics, it can be used to measure the thickness and shape of lenses.

     The technology is also being used in biomedical research, such as looking at cell characteristics under a microscope, analyzing tissue slices, and more. Due to its non-contact and high-precision characteristics, damage caused by contact to biological samples can be avoided when measuring biological samples.

     Let's talk about compatibility and integration. Spectral confocal displacement sensors are highly compatible and can be smoothly integrated with many laboratory equipment and production lines. With a modular design, users can flexibly configure sensors according to different application requirements. And it is easy to combine with the existing automation system, so as to improve the automation level of the production line.

     Through the light acquisition and data processing unit, in the mass production process, users can monitor and adjust the process parameters in real time to ensure that the products produced are almost the same and the quality is stable. In addition, the spectral confocal displacement sensor has a very high detection rate and good sensitivity, and can be combined with machine learning algorithms to make data analysis and fault warning capabilities stronger.

     Finally, let's talk about its development. Spectral confocal displacement sensor technology continues to evolve and innovate. With the continuous advancement of materials science and optical technology, manufacturers are working to improve the performance of sensors, enabling them to improve sensitivity, response time, measurement range, and more. And more and more intelligent features are also being added to meet the measurement needs of the new era.

     In the future, spectral confocal displacement sensors are expected to perform well in more new applications, promote the further popularization of non-contact measurement technology, and provide more powerful support for high-precision and high-efficiency measurement applications.

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