The Sensirion high precision flow sensor

At the heart of the SFC6000D and SFM6000D products is the unparalleled Sensirion CMOSens technology. It combines high-precision sensor components with state-of-the-art signal processing technology on a single chip to provide precisely calibrated and temperature-compensated signals. Thanks to this sensor technology, the Sensirion flowmeters and controllers achieve unmatched speed, accuracy and repeatability at an attractive system cost. Because CMOSens chips have excellent long-term stability, no recalibration is required.

The SFC6000D provides ultra-fast stability time and high control range. The SFC6000D and SFM6000D have been factory calibrated for a variety of gases, and they are highly flexible in terms of mechanical connectors that are interchangeable with off-the-shelf components.

The high performance and low cost of the SFC6000D and SFM6000D make them the best choice for a wide range of applications, such as gas flushing, FOUP, analytical instruments, coatings and medical devices, process automation, and gas mixing.

Features

● A subversive concept combining a plastic body with highly integrated electronics
● Small size, light weight
● High accuracy/repeatability (2%/0.2% of set points)
● Wide control range (500:1)
● Super fast stabilization time (100 ms)
● RS485 and I²C digital ports
● Replaceable 6 mm push-in and push-under connectors
● NIST traceable calibration
● No drift, no field recalibration